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MKS C15002-05 high-power RF generator
Manufacturer: MKS Instruments
Product Number: C15002-05 (KEINOS series)
Category: High-Power RF Generator
Application: Industrial applications particularly in semiconductor manufacturing requiring high-performance RF power generation
Product Description
The MKS C15002-05 is a high-power RF generator designed for industrial applications, particularly in semiconductor manufacturing. It is part of the KEINOS™ series, known for its high performance and reliability.
Detailed Parameter Table
| Parameter Name | Parameter Value |
|---|---|
| Product Model | MKS C15002-05 |
| Manufacturer | MKS Instruments |
| Product Category | RF Generator |
| Frequency | 1.985 MHz |
| Frequency Tuning Range | ±10% |
| Power Output | 5kW, 11kW, 13kW |
| Accuracy | ±5W up to 500W, ±1% from 501W to max power |
| Load Impedance Range | Unlimited |
| Pulse Frequency | Up to 50KHz |
| Pulse Rise Time | <5 µsec |
| Pulse Fall Time | <5 µsec |
| Minimum Pulse Width | 10 µsec |
| Pulse Energy Repeatability | <3% |
| Hot Swap or Pulse on the Fly | Available |
| Pulse Between Two Set Points | Available |
| Pulse Enabled | Via internal or external TTL trigger, SMA |
| Pulse Mode | Master or slave operation |
| Input AC Power | 200/208VAC ±10%, 3 Phase, 50/60 Hz |
| Rated Current | 25 amps max (5kW), 55 amps max (13kW) |
| RF Connector | SQS standard (QC output) |
| Interface | Ethernet, RS232 |
| Dimensions |
5 kW: 5.25” x 17.5” x 24.5” 11 kW & 13 kW: 8.30” x 17.8” x 25.5” (H x W x D) |
| Weight |
5 kW: 25 kg 11 kW & 13 kW: 55 kg |
| Certifications | CE, SEMI S2, SEMI S7, SEMI S14, SEMI F47, CAN/CSA-C22.2 No. 61010-1 |
Core Advantages and Technical Highlights
High Power Output
The MKS C15002-05 provides power outputs of 5kW, 11kW, and 13kW at a frequency of 1.985 MHz, making it suitable for demanding industrial applications.
Robust and Reliable Design
The generator features a robust design with a wide operating temperature range and high electromagnetic compatibility (EMC) standards, ensuring reliable operation in harsh industrial environments.
Versatile Communication Capabilities
The MKS C15002-05 supports multiple communication protocols, including Ethernet and RS232, facilitating seamless integration with various industrial systems.
Typical Application Scenarios
The MKS C15002-05 is widely used in:
-
Semiconductor Manufacturing: For precise control of plasma processes in etching and deposition systems.
-
Research and Development: For high-power RF applications in laboratory settings.
-
Industrial Vacuum Systems: For powering RF plasma systems in various industrial processes.
Installation, Commissioning, and Maintenance Instructions
Installation Preparation
Ensure the environment meets the specified temperature and humidity requirements. Use appropriate tools and safety equipment to secure the generator in place. Connect the input and output cables according to the manufacturer’s guidelines.
Maintenance Suggestions
Regularly inspect the generator for signs of wear or damage. Keep the unit clean and free from dust to prevent overheating and ensure efficient operation.
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MKS C15002-05 high-power RF generator
Manufacturer: MKS Instruments
Product Number: C15002-05 (KEINOS series)
Category: High-Power RF Generator
Application: Industrial applications particularly in semiconductor manufacturing requiring high-performance RF power generation
Product Description
The MKS C15002-05 is a high-power RF generator designed for industrial applications, particularly in semiconductor manufacturing. It is part of the KEINOS™ series, known for its high performance and reliability.
Detailed Parameter Table
| Parameter Name | Parameter Value |
|---|---|
| Product Model | MKS C15002-05 |
| Manufacturer | MKS Instruments |
| Product Category | RF Generator |
| Frequency | 1.985 MHz |
| Frequency Tuning Range | ±10% |
| Power Output | 5kW, 11kW, 13kW |
| Accuracy | ±5W up to 500W, ±1% from 501W to max power |
| Load Impedance Range | Unlimited |
| Pulse Frequency | Up to 50KHz |
| Pulse Rise Time | <5 µsec |
| Pulse Fall Time | <5 µsec |
| Minimum Pulse Width | 10 µsec |
| Pulse Energy Repeatability | <3% |
| Hot Swap or Pulse on the Fly | Available |
| Pulse Between Two Set Points | Available |
| Pulse Enabled | Via internal or external TTL trigger, SMA |
| Pulse Mode | Master or slave operation |
| Input AC Power | 200/208VAC ±10%, 3 Phase, 50/60 Hz |
| Rated Current | 25 amps max (5kW), 55 amps max (13kW) |
| RF Connector | SQS standard (QC output) |
| Interface | Ethernet, RS232 |
| Dimensions |
5 kW: 5.25” x 17.5” x 24.5” 11 kW & 13 kW: 8.30” x 17.8” x 25.5” (H x W x D) |
| Weight |
5 kW: 25 kg 11 kW & 13 kW: 55 kg |
| Certifications | CE, SEMI S2, SEMI S7, SEMI S14, SEMI F47, CAN/CSA-C22.2 No. 61010-1 |
Core Advantages and Technical Highlights
High Power Output
The MKS C15002-05 provides power outputs of 5kW, 11kW, and 13kW at a frequency of 1.985 MHz, making it suitable for demanding industrial applications.
Robust and Reliable Design
The generator features a robust design with a wide operating temperature range and high electromagnetic compatibility (EMC) standards, ensuring reliable operation in harsh industrial environments.
Versatile Communication Capabilities
The MKS C15002-05 supports multiple communication protocols, including Ethernet and RS232, facilitating seamless integration with various industrial systems.
Typical Application Scenarios
The MKS C15002-05 is widely used in:
-
Semiconductor Manufacturing: For precise control of plasma processes in etching and deposition systems.
-
Research and Development: For high-power RF applications in laboratory settings.
-
Industrial Vacuum Systems: For powering RF plasma systems in various industrial processes.
Installation, Commissioning, and Maintenance Instructions
Installation Preparation
Ensure the environment meets the specified temperature and humidity requirements. Use appropriate tools and safety equipment to secure the generator in place. Connect the input and output cables according to the manufacturer’s guidelines.
Maintenance Suggestions
Regularly inspect the generator for signs of wear or damage. Keep the unit clean and free from dust to prevent overheating and ensure efficient operation.
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