DANAHER MOTION 522P35UDRL3000 Product Introduction

DANAHER MOTION 522P35UDRL3000 is a high rigidity linear motor designed specifically for precision machining, semiconductor manufacturing, and high-speed automation equipment. This product adopts a coreless coil and high-precision magnetic circuit design, supporting nanometer level positioning and high-speed dynamic response. It is suitable for scenarios such as wafer cutting, laser microfabrication, and precision inspection that require strict precision and stability in linear motion. Its compact structure and low thermal deformation characteristics make it an ideal choice for high-density equipment integration, while being compatible with multi protocol control and adapting to complex automation systems.

Main features and advantages

Nano level positioning accuracy

The single axis repetitive positioning accuracy reaches ± 0.5 μ m, and the dynamic tracking error is less than 1 μ m, meeting the requirements of semiconductor wafer processing.

Integrated temperature compensation module to counteract the impact of environmental temperature fluctuations on the motion trajectory.

High speed dynamic performance

The maximum speed is 2 m/s and the acceleration is 100 m/s ², suitable for high dynamic scenarios such as laser cutting and high-speed surface mounting.

Low inertia design reduces start stop delay and response time is less than 5 ms.

Low energy consumption and high reliability

The energy efficiency ratio reaches 90%, saving more than 25% energy compared to traditional linear motors.

IP67 protection level, suitable for clean rooms, dusty and mildly corrosive environments.

Modular compatibility

Supports EtherCAT and CANopen communication protocols, allowing seamless integration with mainstream PLCs and motion controllers.

Provide customized installation interfaces to adapt to diverse structures such as rails and robotic arms.

Application areas

This product is widely used in the following scenarios

Semiconductor manufacturing: high-precision linear motion modules for wafer cutting machines and packaging equipment.

Precision machining: Nano level positioning system for laser micro carving and optical component polishing.

Automated testing: AOI optical testing equipment, high-speed scanning mechanism of X-ray flaw detector.

Medical equipment: high stability transmission components for surgical robot guide rails and pathological section analysis systems.

Technical specifications

Parameter specifications

Model 522P35UDRL3000

Type: High rigidity linear motor

Effective travel 300 mm

Maximum thrust of 35 N

Input voltage 24-48 V DC

Working frequency DC 0-20 kHz

Positioning accuracy ± 0.5 μ m (repeatability)

Working temperature: 0 ℃ to+40 ℃

Protection level IP67