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Agilent 5517C Detailed Information

Oct 17, 2025 Agilent

The Agilent 5517C laser interferometer is a high-end instrument for precision measurement and surface topography analysis.It uses laser interferometry technology to provide nanometer-level precision measurement and is suitable for various high-precision measurement fields such as scientific research,manufacturing,semiconductor manufacturing,and precision machining.

Agilent 5517C

Product Features

High-precision measurement

The Agilent 5517C laser interferometer uses laser interferometry technology to provide nanometer-level precision measurement.Its resolution can reach the nanometer level,which is suitable for precise measurement of surface topography,displacement,vibration and other parameters.

High stability and repeatability

The instrument has excellent stability and can maintain high precision even when the environmental conditions change greatly.At the same time,it can provide highly repeatable measurement results to ensure the accuracy and reliability of the data.

Multiple laser beam options

Agilent 5517C is equipped with multiple laser beam options to meet different measurement needs.The standard beam diameter is 6 mm,and optional beam diameters of 3 mm or 9 mm are available for measurement of a larger angle range.

Intuitive operation interface

The instrument is equipped with an intuitive operation interface,which allows users to easily set up and operate the instrument for measurement and data analysis.Various data output formats are provided to facilitate users to record,process and further analyze the measurement results.

Wide measurement range

Agilent 5517C is suitable for a variety of high-precision measurement fields,including optical surface measurement,displacement and vibration measurement,micro components and semiconductor measurement,etc.

Agilent 5517C

Product parameters

Laser beam diameter:standard 6 mm,optional 3 mm or 9 mm

Minimum output power:180µW,optional 300µW,240µW or 400µW

Maximum linear optical speed:700 mm/sec(or 711 mm/s,depending on electronics and receiver)

Reference frequency:2.4 to 3.0 MHz

Weight:Approx.3.4 kg

Power requirements:0.3V maximum at+15V±2.2A,0.3V maximum at+15V±0.02A

Agilent 5517C

Application areas

Optical surface measurement

Used to measure surface topography,such as flatness,surface roughness,etc.

Displacement and vibration measurement

Suitable for high-precision displacement measurement and dynamic vibration analysis,commonly used in the testing of precision machinery and automation equipment.

Micro-component and semiconductor measurement

Widely used in the measurement of micro-components and micro-structures in semiconductor manufacturing to ensure the dimensional accuracy of products.

Research and Development

In the field of scientific research,especially in the research of physics,materials science and nanotechnology,the Agilent 5517C laser interferometer can provide accurate surface analysis data.

Product Advantages

High Precision and High Stability

The Agilent 5517C laser interferometer excels in the field of precision measurement with its high precision and high stability.

Multiple Configuration Options

A variety of laser beam options and output power options are available to meet different measurement needs.

Intuitive and easy-to-use operation interface

Users can easily set up and operate the instrument for measurement and data analysis.

Wide range of applications

Applicable to optical surface measurement,displacement and vibration measurement,micro components and semiconductor measurement and many other fields.

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