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AMAT 0090-07135 Mass Flow Controller (MFC) Interface
Manufacturer: Applied Materials (AMAT)
Product Number: 0090-07135
Category: Mass Flow Controller (MFC) Interface Module
Application: Semiconductor manufacturing processes requiring precise control and monitoring of gas flow rates
Product Description
The AMAT 0090-07135 is a high-precision mass flow controller (MFC) interface module designed for semiconductor manufacturing processes. It is part of the AMAT semiconductor equipment series and is used to ensure precise control and monitoring of gas flow in various semiconductor fabrication processes.
Detailed Parameter Table
| Parameter Name | Parameter Value |
|---|---|
| Product model | AMAT 0090-07135 |
| Manufacturer | Applied Materials (AMAT) |
| Product category | Mass Flow Controller (MFC) Interface |
| Control Channels | 8 independent gas lines |
| Flow Range | 0-5000 sccm (N2 equivalent) |
| Accuracy | ±0.8% of reading ±0.2% full scale |
| Response Time | <500ms (0-90% FS) |
| Communication | DeviceNet, RS-485 |
| Power Supply | 24V DC ±10% |
| Cleanliness | Class 1 cleanroom compliant |
| Certifications | SEMI S2, SEMI F47, CE |
| Dimensions (W x H x D) | 10.5 cm x 15 cm x 5 cm |
| Weight | 1.2 kg |
| Operating Temperature Range | -20°C to +85°C |
| Input Voltage | 24 VDC |
| Current Rating | Up to 2 A |
| Protection Features | Overload protection, short circuit protection |
Core Advantages and Technical Highlights
Precision Gas Control:
-
Closed-loop PID control with 16-bit resolution.
-
Automatic temperature compensation.
Process Optimization:
-
Recipe-based flow profiling.
-
Real-time drift compensation.
Fault Protection:
-
Leak detection algorithm.
-
Over-pressure shutdown.
High Reliability:
-
Built using high-quality materials to ensure long-lasting performance and durability under harsh industrial conditions.
User-Friendly Design:
-
Easy to install and integrate into existing systems, reducing downtime and improving overall productivity.
Typical Application Scenarios
The AMAT 0090-07135 is widely used in various semiconductor manufacturing processes:
-
Etch Processes: Deep silicon etch (TSV), dielectric etch (SiO₂, Si₃N₄).
-
Deposition Processes: PECVD of SiO₂, SiN, or low-k films.
-
Chamber Cleaning: NF₃/O₂ plasma cleans.
Installation Commissioning and Maintenance Instructions
Installation Preparation:
-
Ensure the environment meets the specified temperature and humidity requirements (-20°C to +85°C).
-
Use shielded cables and proper grounding to minimize electromagnetic interference.
Maintenance Suggestions:
-
Regularly inspect connections for wear and clean the module with a static-free cloth to ensure optimal heat dissipation.
-
Perform annual full calibration and quarterly leak checks (He mass spec recommended).
-
Replace O-rings every 2 years and verify ground connections (impedance <1Ω).
Service and Guarantee Commitment
Applied Materials stands behind the quality and reliability of the 0090-07135, offering a comprehensive warranty that covers manufacturing defects and performance issues for a specified period. Their dedicated after-sales support team is available to assist with technical inquiries and provide prompt solutions to ensure minimal disruption to your operations.
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AMAT 0090-07135 Mass Flow Controller (MFC) Interface
Manufacturer: Applied Materials (AMAT)
Product Number: 0090-07135
Category: Mass Flow Controller (MFC) Interface Module
Application: Semiconductor manufacturing processes requiring precise control and monitoring of gas flow rates
Product Description
The AMAT 0090-07135 is a high-precision mass flow controller (MFC) interface module designed for semiconductor manufacturing processes. It is part of the AMAT semiconductor equipment series and is used to ensure precise control and monitoring of gas flow in various semiconductor fabrication processes.
Detailed Parameter Table
| Parameter Name | Parameter Value |
|---|---|
| Product model | AMAT 0090-07135 |
| Manufacturer | Applied Materials (AMAT) |
| Product category | Mass Flow Controller (MFC) Interface |
| Control Channels | 8 independent gas lines |
| Flow Range | 0-5000 sccm (N2 equivalent) |
| Accuracy | ±0.8% of reading ±0.2% full scale |
| Response Time | <500ms (0-90% FS) |
| Communication | DeviceNet, RS-485 |
| Power Supply | 24V DC ±10% |
| Cleanliness | Class 1 cleanroom compliant |
| Certifications | SEMI S2, SEMI F47, CE |
| Dimensions (W x H x D) | 10.5 cm x 15 cm x 5 cm |
| Weight | 1.2 kg |
| Operating Temperature Range | -20°C to +85°C |
| Input Voltage | 24 VDC |
| Current Rating | Up to 2 A |
| Protection Features | Overload protection, short circuit protection |
Core Advantages and Technical Highlights
Precision Gas Control:
-
Closed-loop PID control with 16-bit resolution.
-
Automatic temperature compensation.
Process Optimization:
-
Recipe-based flow profiling.
-
Real-time drift compensation.
Fault Protection:
-
Leak detection algorithm.
-
Over-pressure shutdown.
High Reliability:
-
Built using high-quality materials to ensure long-lasting performance and durability under harsh industrial conditions.
User-Friendly Design:
-
Easy to install and integrate into existing systems, reducing downtime and improving overall productivity.
Typical Application Scenarios
The AMAT 0090-07135 is widely used in various semiconductor manufacturing processes:
-
Etch Processes: Deep silicon etch (TSV), dielectric etch (SiO₂, Si₃N₄).
-
Deposition Processes: PECVD of SiO₂, SiN, or low-k films.
-
Chamber Cleaning: NF₃/O₂ plasma cleans.
Installation Commissioning and Maintenance Instructions
Installation Preparation:
-
Ensure the environment meets the specified temperature and humidity requirements (-20°C to +85°C).
-
Use shielded cables and proper grounding to minimize electromagnetic interference.
Maintenance Suggestions:
-
Regularly inspect connections for wear and clean the module with a static-free cloth to ensure optimal heat dissipation.
-
Perform annual full calibration and quarterly leak checks (He mass spec recommended).
-
Replace O-rings every 2 years and verify ground connections (impedance <1Ω).
Service and Guarantee Commitment
Applied Materials stands behind the quality and reliability of the 0090-07135, offering a comprehensive warranty that covers manufacturing defects and performance issues for a specified period. Their dedicated after-sales support team is available to assist with technical inquiries and provide prompt solutions to ensure minimal disruption to your operations.
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